EPE Association: EPE 2020 - LS6e: Industry Specific Energy Conversion and Conditionning Technologies (ECCT)

EPE 2020 - LS6e: Industry Specific Energy Conversion and Conditionning Technologies (ECCT)
You are here: EPE Documents > 01 - EPE & EPE ECCE Conference Proceedings > EPE 2020 ECCE Europe - Conference > EPE 2020 - Topic 09: Industry-Specific Energy Conversion and Conditioning Technologies > EPE 2020 - LS6e: Industry Specific Energy Conversion and Conditionning Technologies (ECCT)

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   A Switched-Mode Power Amplifier for Ion Energy Control In Plasma Etching
By Qihao YU [View]
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Abstract: Plasma etching is an important process in the semiconductor manufacturing process. In order to preciselycontrol the ion energy for better process quality, a tailored pulse-shape voltage waveform is applied tothe plasma reactor table. Traditionally, a linear amplifier is used to generate this waveform, which resultsin poor efficiency. This paper proposes a switched-mode power amplifier as a substitute to the traditionallinear amplifier. The electric equivalent circuit of the plasma reactor is introduced and a basic topologyfor the switched-mode power amplifier is derived. The basic topology is able to generate the requiredwaveform but it has a low efficiency of charging the capacitive load in practice. Therefore, an efficiencyimprovedtopology is proposed by adopting resonant charging. A prototype is built in order to validatethe research. The experiments show that the presented solution yields a significantly reduced input powercompared to the normally used linear amplifier in this application.

   Comparative study of two control techniques of regenerative braking power recovering inverter based DC railway substation
By Khaled ALMAKSOUR [View]
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Abstract: This work is focused on the improving of the energy efficiency of electrical train in braking mode. The improvement is explored by integration and control of a reversible inverter in a DC power substation to inject the braking power from the DC railway electrical network to the AC transmission grid. This solution makes the power substation reversible. The objective of this study is to investigate a control strategy by adjustment of the catenary DC voltage by the inverter in order to recover the maximum of electric braking energy by keeping the DC voltage of the substation stable with a reference value. A comparative study of simulation results of the proposed control scheme with a droop control technique for the railway substation "Massena" in Paris is presented.

   Design of a pulse modulator based on transmission lines for generating fast current pulses for plasma drilling
By Oliver KEEL [View]
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Abstract: This paper presents the design procedure of a pulse modulator based on parallel connected transmission lines for plasma drilling. The procedure focuses on minimizing the parasitic capacitances/inductances of the modulator to achieve a fast current rise time, which is necessary for plasma drilling. Furthermore, a concept for a scaled prototype system is presented.

   Transient thermal models of capacitors and inductors for system optimization
By Vasilios KARAVENTZAS [View]
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Abstract: In accelerators using superconducting magnets, energy extraction systems (EES) are employed as means of protection in case of a quench, i.e. the spontaneous transition of the magnets from superconducting to resistive state. These EES operate only for short durations so that, for identifying an optimal design, the thermal transient properties/models of the system components are required. Therefore, a transient thermal model of cylindrical film capacitors based on physical properties is presented in detail in this paper. The model is based only on data sheet values and is validated experimentally. In addition, a transient thermal model of inductors is presented and validated by FEM simulations. Finally, it is shown that the power density of a converter for an energy extraction system could be more than doubled, if the presented transient thermal models of the passive components are used in the design optimization process.

EPE 2020 - LS6e: Industry Specific Energy Conversion and Conditionning Technologies (ECCT)
You are here: EPE Documents > 01 - EPE & EPE ECCE Conference Proceedings > EPE 2020 ECCE Europe - Conference > EPE 2020 - Topic 09: Industry-Specific Energy Conversion and Conditioning Technologies > EPE 2020 - LS6e: Industry Specific Energy Conversion and Conditionning Technologies (ECCT)
	[return to parent folder]

	A Switched-Mode Power Amplifier for Ion Energy Control In Plasma Etching By Qihao YU	[View] [Download]
Abstract: Plasma etching is an important process in the semiconductor manufacturing process. In order to preciselycontrol the ion energy for better process quality, a tailored pulse-shape voltage waveform is applied tothe plasma reactor table. Traditionally, a linear amplifier is used to generate this waveform, which resultsin poor efficiency. This paper proposes a switched-mode power amplifier as a substitute to the traditionallinear amplifier. The electric equivalent circuit of the plasma reactor is introduced and a basic topologyfor the switched-mode power amplifier is derived. The basic topology is able to generate the requiredwaveform but it has a low efficiency of charging the capacitive load in practice. Therefore, an efficiencyimprovedtopology is proposed by adopting resonant charging. A prototype is built in order to validatethe research. The experiments show that the presented solution yields a significantly reduced input powercompared to the normally used linear amplifier in this application.

	Comparative study of two control techniques of regenerative braking power recovering inverter based DC railway substation By Khaled ALMAKSOUR	[View] [Download]
Abstract: This work is focused on the improving of the energy efficiency of electrical train in braking mode. The improvement is explored by integration and control of a reversible inverter in a DC power substation to inject the braking power from the DC railway electrical network to the AC transmission grid. This solution makes the power substation reversible. The objective of this study is to investigate a control strategy by adjustment of the catenary DC voltage by the inverter in order to recover the maximum of electric braking energy by keeping the DC voltage of the substation stable with a reference value. A comparative study of simulation results of the proposed control scheme with a droop control technique for the railway substation "Massena" in Paris is presented.

	Design of a pulse modulator based on transmission lines for generating fast current pulses for plasma drilling By Oliver KEEL	[View] [Download]
Abstract: This paper presents the design procedure of a pulse modulator based on parallel connected transmission lines for plasma drilling. The procedure focuses on minimizing the parasitic capacitances/inductances of the modulator to achieve a fast current rise time, which is necessary for plasma drilling. Furthermore, a concept for a scaled prototype system is presented.

	Transient thermal models of capacitors and inductors for system optimization By Vasilios KARAVENTZAS	[View] [Download]
Abstract: In accelerators using superconducting magnets, energy extraction systems (EES) are employed as means of protection in case of a quench, i.e. the spontaneous transition of the magnets from superconducting to resistive state. These EES operate only for short durations so that, for identifying an optimal design, the thermal transient properties/models of the system components are required. Therefore, a transient thermal model of cylindrical film capacitors based on physical properties is presented in detail in this paper. The model is based only on data sheet values and is validated experimentally. In addition, a transient thermal model of inductors is presented and validated by FEM simulations. Finally, it is shown that the power density of a converter for an energy extraction system could be more than doubled, if the presented transient thermal models of the passive components are used in the design optimization process.