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Performance of 3D capacitors integrated on silicon for DC-DC converter applications.
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| Author(s) |
MAURAN Nicolas; BARY Laurent; BENAZZI Amine; SANCHEZ Jean-Louis; BRUNET Magali; DUBREUIL Pascal |
| Abstract |
The integration of passive components on silicon for future DC-DC converters applications is still a challenging area of research. This paper focuses on integrated 3D capacitors with high capacitance density fabricated with microfabrication techniques on silicon and in particular DRIE. The fabricated prototypes were characterised: a capacitance density between 29 and 46 nF/mm was demonstrated up to 800 kHz. An improvement is presented on the equivalent series resistance (ESR), which impedes currently on the component utilisation at higher frequencies. |
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| Filename: | 0652-epe2007-full-13373679.pdf |
| Filesize: | 402.1 KB |
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| Type |
Members Only |
| Date |
Last modified 2008-01-11 by System |
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