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Fabrication of an integrated spiral-type inductor dedicated to DC-DC microconverters
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Author(s) |
LAUR Jea |
Abstract |
This paper describes the fabrication steps of a spiral-type inductor designed for power electronics conversion. Realized on silicon wafer and using photolithography and electroplating techniques, this microinductor is composed of a copper spiral conductor sandwiched between two iron-nickel laminated magnetic layers. Furthermore, specific devices have been realized in order to characterize the magnetic material. |
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Filename: | 0736 |
Filesize: | 559.9 KB |
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Type |
Members Only |
Date |
Last modified 2006-02-08 by System |
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