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Fabrication Technology And Modeling Of Electrostatically Actuated Microswitch
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| Author(s) |
Vytautas Ostasevicius, Rolanas Dauksevicius, Sigitas Tamulevicius, Algimantas Bubulis |
| Abstract |
The paper describes surface-micromachined electrostatically
actuated microswitch and its fabrication technology,
which was developed for the first time in Lithuania, in Kaunas
University of Technology. The dimensions of the smallest microdevice
are 67 ×30 ×3.2 µm. Mathematical model of the microswitch
is considered, which takes into account electrostatic
actuation, squeeze-film damping and impact interactions between
contacting element and substrate that greatly influence
switching speed, reliability and durability of the switch. |
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| Filename: | A57305 |
| Filesize: | 680 KB |
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| Type |
Members Only |
| Date |
Last modified 2006-02-17 by System |
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