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Silicon Electrostatic Micromotor
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| Author(s) |
S. Wiak; P. Dumania; Z. Lisik; Z. Szczepaniak |
| Abstract |
The paper deals with a new construction of electrostatic micromotors manufactured with the use of microlectronics technology. Two solutions of such a motor are considered theoretically and the procedure to design them is presented. The manufactured examples of such motors manufactured on silicon platform together with the appropriate control unit are presented as well. |
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| Filename: | EPE-PEMC2002 - T10-002 - Wiak.pdf |
| Filesize: | 321.5 KB |
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| Type |
Members Only |
| Date |
Last modified 2004-05-13 by System |
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