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Development of a New Technology for Inductive Device Applications
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| Author(s) |
E. Belloy; O. Dezuari; S. E. Gilbert; M.A.M. Gijs |
| Abstract |
We describe the fabrication and characterization of 2-dimensional inductive devices integrated inside printed circuit boards (PCB) and flex-foils. Our devices basically are composed of three layers of which the outer layers bear the printed coil patterns and the inner layer is a high permeability ferromagnetic sheet core. Both magnetic metal and copper layers are patterned using standard lithographic techniques. Electroplated interconnects between the outer layers complete the windings. We have fabricated both transformers and fluxgate magnetic field sensing devices with a thickness of 200 um for the flex-foil devices and 600 um for the PCB-based devices. Materal dimensions are approximately 1 cm. We realise a magnetic field detection limit of 43 uT at 20 kHz for the fluxgate devices relatively and inductances of 1-10 uH at a frequency of 1 kHz for the transformers. Application of our devices is in magnetic field and current sensing and in low power electronics, where miniaturisation is an issue. |
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| Filename: | EPE1999 - PP00842 - Belloy.pdf |
| Filesize: | 374.2 KB |
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| Type |
Members Only |
| Date |
Last modified 2004-03-29 by System |
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