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Optimised Pulse Modulation for Plasma Power Supply
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| Author(s) |
P. Schmitt; C. Gerster |
| Abstract |
In this paper, a new modulation technique is introduced that combines current- and voltage mode
control with active pulse balancing to prevent saturation of the transformer of a modular switched
mode power supply for plasma applications. Transformers with amorphous alloy or nano-crystallin
alloy core materials can be operated efficiently in the medium-frequency range with resonant IGBT
circuits. The switching commands for the power semiconductor are preferably digitally generated. The
modulation technique was realized with a CPLD and tested in a digital controlled plasma supply. |
| Download |
| Filename: | EPE2001 - PP00215 - Schmitt.pdf |
| Filesize: | 204.7 KB |
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| Type |
Members Only |
| Date |
Last modified 2004-03-11 by System |
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