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Silicon Nonlinear Capacitors
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| Author(s) |
H. Hakim; J-P. Laur; J-L Sanchez; E. Scheid; P. Dubreuil |
| Abstract |
This paper is focused on the integration of nonlinear capacitors for power electronics
applications. We study more particularly a structure based on a trench topology and combining
MOS and PN junction capacitance effects. Static and dynamic behaviour of the device are
analyzed thanks to simulations. A specifical peripheral termination for deep trench devices is
proposed. Finally we present the main process steps and the electrical characterization results of
the first prototypes. |
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| Filename: | EPE2001 - PP00279 - Hakim.pdf |
| Filesize: | 180.4 KB |
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| Type |
Members Only |
| Date |
Last modified 2004-03-10 by System |
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