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Evaluation of electrical and thermal properties of single crystalline diamond with large area of 18 mm×18 mm for power module
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| Author(s) |
Kunio KOSEKI |
| Abstract |
Diamond substrate was evaluated from the viewpoint of voltage withstand and thermal performance. High voltage of up to 30 kV was successfully applied without electrical breakdown to thin substrate of 300 _m. Superior thermal performance of 0.95 K/W compared to conventional materials (silicon nitride and aluminum nitride) was also measured with a single-crystalline mosaic diamond substrate with large area of 18 mm×18 mm. |
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| Filename: | 0016-epe2019-full-07340821.pdf |
| Filesize: | 272.9 KB |
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| Type |
Members Only |
| Date |
Last modified 2020-08-14 by System |
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