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	A New Drive For The Micrometer- And Submicrometer-Range	[View]   [Download]
Author(s)	P.-K. Budig; H. Timmel; J. hofmann; K. Peschke; U. Schuffenhauer; R. Zeumann
Abstract	A new drive which is of simple electromechanicel design being able to make motions in the micrometer- and even in the submicrometer-range was developed. Its function principles and test results are shown.
Download	Filename: Unnamed file Filesize: 1.904 MB
Type	Members Only
Date	Last modified 2019-08-07 by System