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APPLICATION OF DIAMOND-LIKE LAYERS AS PASSIVATION AND ISOLATION LAYERS IN POWER SEMICONDUCTOR DEVICES
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| Author(s) |
Z. Lisik; S. Mitura; J. Szmidt |
| Abstract |
Diamond-like carbon (DLC) layers, due to their properties, can act as very attractive material for microelectronics technology. In particular, they can be used to create protection and passivation layers in power semiconductors. In the contribution the investigations concerning such an application of the DLC layers in manufacturing of a power fast thyristor are presented. Two applications are considered as a
passivation coating for both junctions of n-base and as a protection layer deposited on gate contact at. cathode side of the thyristor. Since the properties of DLC layer strongly depend on the technology, the used technology process as well as technology apparatus are described as well. |
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| Filesize: | 292.9 KB |
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| Type |
Members Only |
| Date |
Last modified 2018-05-17 by System |
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