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A CMOS Compatible Smart Power Process with Complete Dielectric Isolation
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| Author(s) |
J. Weyers; W. Rost; E. Musch; H. Vogtl; J. Millan; S. Hidalgo; J. Reboflo; J. Fernandez |
| Abstract |
This paper describes a new CMOS compatible SIMOX process for fabrication of area efficient 50V Smart Power Full-Bridges with complete dielectric isolation. The main application is the production of 'intelligent' switches and Full-Bridge drivers with enhanced robustness and noise immunity for the increasing challenges of the automotive electronic market. |
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| Filename: | Unnamed file |
| Filesize: | 595.9 KB |
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| Type |
Members Only |
| Date |
Last modified 2016-02-01 by System |
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