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Development of a High Voltage Deep Trench Environment for a Smart Power Technology
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| Author(s) |
MARTIN KNAIPP |
| Abstract |
The paper describes a deep trench module development for a Smart Power Technology by introducing a lateral dielectric isolation. The approach to introduce the new isolation type in a modular way has impact on the process development and the layout environment. The work describes the advantages and the limitations of the new isolation type which results in a new way of product layouting. |
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| Filename: | 0181-epe2009-full-22281213.pdf |
| Filesize: | 796.2 KB |
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| Type |
Members Only |
| Date |
Last modified 2010-01-27 by System |
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